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Epitaxial BaTiO3 thin films on MgO by Ch. Buchal; L. Beckers; A. Eckau; J. Schubert; W. Zander is a Materials Science article available to read on EtoBox.

What is Epitaxial BaTiO3 thin films on MgO about?

The epitaxy of thin films of BaTiO 3 is motivated by the potential integration of electrooptical functions onto silicon. An epitaxial buffer layer of MgO on Si will be needed for optical waveguide formation and for enabling the growth of BaTiO 3 . In a first step, epitaxial waveguide structures of c-axis oriented BaTiO 3 thin films on MgO (001) have been grown by pulsed laser deposition (PLD). The structural properties of the samples have been characterized by Rutherford backscattering spectrometry/ ion channeling (RBS/C) and X-Ray diffraction (XRD). We found excellent crystalline quality even up to a thickness of a few microns. Waveguide losses of 2.9 dB cm -1 have been demonstrated.

Who reads Epitaxial BaTiO3 thin films on MgO?

Author

Ch. Buchal; L. Beckers; A. Eckau; J. Schubert; W. Zander

Publisher

Elsevier Science; Elsevier ; Elsevier Ltd; Elsevier BV (ISSN 0921-5107)

Published

1998

Language

EN

Field

Materials Science (Physical Sciences)