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Synthesis and Evaluation of Novel PAGs for ArF Lithography by Kodama, Kunihiko; Sato, Kenichiro; Tan, Shiro; Nishiyama, Fumiyuki; Yamanaka, Tsukasa; Kanna, Shinnichi; Takahashi, Hyou; Kawabe, Yasumasa; Momota, Makoto; Kokubo, Tadayoshi is a Engineering article available to read on EtoBox.
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- Author
- Kodama, Kunihiko; Sato, Kenichiro; Tan, Shiro; Nishiyama, Fumiyuki; Yamanaka, Tsukasa; Kanna, Shinnichi; Takahashi, Hyou; Kawabe, Yasumasa; Momota, Makoto; Kokubo, Tadayoshi
- Publisher
- Japan Science and Technology Information Aggregator, Electronic; The Technical Association of Photopolymers, Japan; Technical Association of Photopolymers; Technical Association of Photopolymers, Japan (ISSN 0914-9244)
- Published
- 2004
- Field
- Engineering (Physical Sciences)