About this scholarly article

SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Smart Materials II - Deposition of Pb(ZrxTi1-x)O3 thin films by laser ablation for MEMS application by Wang, Zhan Jie; Maeda, Ryutaro; Kokawa, Hiroyuki; Wilson, Alan R. is a scholarly article available to read on EtoBox.

Author

Wang, Zhan Jie; Maeda, Ryutaro; Kokawa, Hiroyuki; Wilson, Alan R.

Publisher

SPIE

Published

2002