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Polymer derived ceramic microparts from X-ray lithography—cross-linking behavior and process optimization by Michael Schulz; Martin Börner; Jürgen Haußelt; Richard Heldele is a Materials Science article available to read on EtoBox.

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The fabrication of micro components made from ceramic materials is becoming more and more important because of their outstanding chemical stability. Different replication methods like low or high-pressure injection molding of ceramic feedstocks have been established. Various lithographic methods are being widely used for the direct fabrication of very precise plastic or metal micro structured surfaces. The presented work deals with the direct manufacturing of microstructures by using ceramic precursors in combination with X-ray lithography. This allows for a rapid fabrication of micro structured plastic components that are stable at high temperatures (400 • C), chemically resistant and transparent. Pyrolysis of these parts yields amorphous Si C N or Si 3 N 4 ceramics. The applicability of different preceramic polymers based on polysilazane for direct structuring with synchrotron radiation was investigated. X-ray exposures of polysilazane polymer filled with Si 3 N 4 ceramic powders were carried out, showing that it is possible to microstructure those composites. By inserting ceramic fillers, a reduction of the shrinkage during pyrolysis was possible. Further investigations were mad

Who reads Polymer derived ceramic microparts from X-ray lithography—cross-linking behavior and process optimization?

Author

Michael Schulz; Martin Börner; Jürgen Haußelt; Richard Heldele

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0955-2219)

Published

2005

Language

EN

Field

Materials Science (Physical Sciences)