About this scholarly article

2013 IEEE International Interconnect Technology Conference - IITC - Development and evaluation of a-SiC:H films using a dimethylsilacyclopentane precursor as a low-k Cu capping layer by Van Besien, Els; Wang, Cong; Verdonck, Patrick; Singh, Arjun; Barbarin, Yohan; de Marneffe, Jean-Francois; Vanstreels, Kris; Tielens, Hilde; Schaekers, Marc; Baklanov, Mikhail R.; Van Elshocht, Sven is a scholarly article available to read on EtoBox.

Author

Van Besien, Els; Wang, Cong; Verdonck, Patrick; Singh, Arjun; Barbarin, Yohan; de Marneffe, Jean-Francois; Vanstreels, Kris; Tielens, Hilde; Schaekers, Marc; Baklanov, Mikhail R.; Van Elshocht, Sven

Publisher

IEEE

Published

2013

Language

EN