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What is Photolithography Process Overview about?

This document provides a seminar report on photolithography presented by three students. It includes an introduction to photolithography and its history, a diagram showing the basic photolithography process steps, and sections describing each step in more detail. The main applications of photolithography for MEMS, microcircuits fabrication, and sensors are discussed. Advantages and disadvantages of the technique are also mentioned.

Author

Soumyadeep Kundu

Language

EN