About this scholarly article

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - High sensitive micro thermal conductivity detector with sandwich structure by Feng, Fei; Tian, Bowen; Hou, Lei; Yu, Zhengyin; Zhou, Haimei; Ge, Xiaohong; Li, Xinxin is a scholarly article available to read on EtoBox.

Author

Feng, Fei; Tian, Bowen; Hou, Lei; Yu, Zhengyin; Zhou, Haimei; Ge, Xiaohong; Li, Xinxin

Publisher

IEEE

Published

2017

Language

EN