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About this Physics and Astronomy article
Combination of Grazing Incidence X-ray Fluorescence with X-ray Reflectivity in One Table-top Spectrometer for Improved Characterization of Thin Layer and Implants On/in Silicon Wafers by Ingerle, D.; Schiebl, M.; Streli, C.; Wobrauschek, P. is a Physics and Astronomy article available to read on EtoBox.
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- Author
- Ingerle, D.; Schiebl, M.; Streli, C.; Wobrauschek, P.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0034-6748)
- Published
- 2014
- Field
- Physics and Astronomy (Physical Sciences)
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