Opening book details…
About this Engineering article
Estimation of Carbon Fluxes Interchanging between Chamber Wall and Gas Phase in Fluorocarbon Plasmas by N. Takada; K. Sasaki; T. Iida; K. Shibagaki; K. Kadota is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- N. Takada; K. Sasaki; T. Iida; K. Shibagaki; K. Kadota
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2003
- Language
- EN
- Field
- Engineering (Physical Sciences)
More by N. Takada; K. Sasaki; T. Iida; K. Shibagaki; K. Kadota
Browse all works by N. Takada; K. Sasaki; T. Iida; K. Shibagaki; K. Kadota