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What is MEMS Piezoresistive Pressure Sensor Array about?
This study presents the design and implementation of a monolithically integrated array-type MEMS piezoresistive pressure sensor system, consisting of two groups of four sensors for pressure ranges of 0–50 kPa and 0–100 kPa. The system utilizes finite element modeling for optimization, and incorporates a genetic algorithm wavelet neural network for temperature drift compensation, achieving high sensitivity and linearity. Calibration results indicate an overall error of ±0.252% across the combined pressure ra
- Author
- nguyenduydang254
- Language
- EN