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A simple VLSI spherical particle-induced fault simulator: application to DRAM production process by Koji Nakamae; Hisanaga Ohmori; Hiromu Fujioka is a Engineering article available to read on EtoBox.

What is A simple VLSI spherical particle-induced fault simulator: application to DRAM production process about?

A simple VLSI particle-induced fault simulator has been proposed where the mappings of the eect of particles to defects or to faults are modeled. The simulator allows us to predict the entire yield of VLSI and also to analyze the bottleneck processing step and faults. In the simulator, particles with spherical shape are generated in the production equipment for each VLSI processing step and are deposited on the wafer. The simulator accepts as inputs (a) layout description of the VLSI design under analysis in GDS II format, (b) production ̄ow data, (c) planned layer thickness data, and (d) particle parameters for each production equipment. The predictor was applied to a 16-Mbit DRAM production process to show its validity.

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Author

Koji Nakamae; Hisanaga Ohmori; Hiromu Fujioka

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)

Published

2000

Language

EN

Field

Engineering (Physical Sciences)