About this Engineering article
Effect of Bias Voltage on Mechanical Properties of HiPIMS/RFMS Cosputtered Zr–Si–N Films by Chen, Yung-I; Zheng, Yu-Zhe; Chang, Li-Chun; Liu, Yu-Heng is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Chen, Yung-I; Zheng, Yu-Zhe; Chang, Li-Chun; Liu, Yu-Heng
- Publisher
- MDPI AG; MDPI Open Access Publishing; Basel: MDPI, 2008-; Publons (ISSN 1996-1944)
- Published
- 2019
- Field
- Engineering (Physical Sciences)