Can I read Low-Temperature MOS Capacitor Study on EtoBox?
Low-Temperature MOS Capacitor Study by mar.aurel is a document available to read on EtoBox.
What is Low-Temperature MOS Capacitor Study about?
The document presents a study on the cryogenic performance of ultrathin oxide MOS capacitors using in situ doped p+ poly-Si1−xGex and poly-Si gate materials, focusing on their low-temperature electrical characteristics. It highlights significant changes in flat band voltage and capacitance behavior at low temperatures, revealing unique phenomena such as multiple zero-temperature coefficients. The findings suggest that the temperature dependence of tunneling current is primarily influenced by oxide thickness
- Author
- mar.aurel
- Language
- EN