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Can I read An Auto‐focusing Method for Imaging Ellipsometry System on EtoBox?
An Auto‐focusing Method for Imaging Ellipsometry System by Y. H. Meng; S. Chen; G. Jin is a Engineering article available to read on EtoBox.
What is An Auto‐focusing Method for Imaging Ellipsometry System about?
## Abstract An auto‐focusing method based on the image brightness gradient sharpness function is presented for imaging ellipsometry system, in which the image plane of the thin‐film specimen is not perpendicular to the optical axis. The clear image of a specimen with large area is obtained by moving the imaging sensor in optical axis direction and around its sensitive surface centre successively. The experimental results demonstrate its feasibility. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Who reads An Auto‐focusing Method for Imaging Ellipsometry System?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Y. H. Meng; S. Chen; G. Jin
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); Wiley - V C H Verlag GmbbH & Co.; Wiley (ISSN 1862-6351)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)