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Can I read Heteroepitaxial technologies of III–V on Si on EtoBox?
Heteroepitaxial technologies of III–V on Si by H Kawanami is a Engineering article available to read on EtoBox.
What is Heteroepitaxial technologies of III–V on Si about?
Many kinds of heteroepitaxial technologies to improve the quality of III}V on Si are discussed. Surface cleaning and preparation for epitaxial growth, initial interfacial bu!er layers between the substrate and the "lm, many kinds of intermediate layers such as strained layer super lattice (SLS) inserted in the "lms, low substrate temperature growth and thermal treatments during and after "lm growth are reviewed. Defect passivation and growth on the patterned substrates are also discussed. Among these methods, essential processes are proposed to evaluate their e!ectiveness for the defect reduction.
Who reads Heteroepitaxial technologies of III–V on Si?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- H Kawanami
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0927-0248)
- Published
- 2001
- Language
- EN
- Field
- Engineering (Physical Sciences)