About this scholarly article

2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Vacuum emission in large-area nanogap fabricated by MEMS-controlled cleavage of single crystal silicon by Banerjee, Amit; Hirai, Yoshikazu; Tsuchiya, Toshiyuki; Tabata, Osamu is a scholarly article available to read on EtoBox.

Author

Banerjee, Amit; Hirai, Yoshikazu; Tsuchiya, Toshiyuki; Tabata, Osamu

Publisher

IEEE

Published

2018

Language

EN