Opening book details…
About this Materials Science article
Physical Properties and Structure of rf-Sputtered Amorphous Films in the System Al2O3–Y2O3 by Kentaro Fukuda; Teiichi Hanada; Setsuhisa Tanabe; Takeshi Yao is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Kentaro Fukuda; Teiichi Hanada; Setsuhisa Tanabe; Takeshi Yao
- Publisher
- John Wiley and Sons; Wiley (Blackwell Publishing); Wiley-Blackwell; Wiley (ISSN 0002-7820)
- Published
- 2004
- Language
- EN
- Field
- Materials Science (Physical Sciences)
More by Kentaro Fukuda; Teiichi Hanada; Setsuhisa Tanabe; Takeshi Yao
Browse all works by Kentaro Fukuda; Teiichi Hanada; Setsuhisa Tanabe; Takeshi Yao