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About this Engineering article
Complete surface exfoliation of 4H–SiC by H+- and Si+-coimplantation by Bennett, J. A.; Holland, O. W.; Budde, M.; Thomas, D. K.; Feldman, L. C. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Bennett, J. A.; Holland, O. W.; Budde, M.; Thomas, D. K.; Feldman, L. C.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2000
- Field
- Engineering (Physical Sciences)
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