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PDMS Thickness vs. Spin Speed Analysis by Gopal Chandra Pal is a document available to read on EtoBox.
The thickness of a spin coated PDMS layer depends mainly on the spin speed and spinning duration. Several publications have shown that higher spin speeds and longer spinning times result in thinner PDMS layers, down to micron thicknesses. Specifically, one study found PDMS layers ranging from 220 μm at 500 rpm to 8 μm at 8000 rpm when spun for 60 seconds. Another similar study measured thicknesses from 20 μm to 12 μm over the range of 500 to 10000 rpm for 30 second spin times.
- Author
- Gopal Chandra Pal
- Language
- EN