About this scholarly article

2011 National Postgraduate Conference - Theoretical analysis of resonant lateral electrostatic Comb drive actuator and sensor by Ahmad, Farooq; Khir, Mohd Haris Md; Hamid, Nor Hisham; Dennis, John Ojur is a scholarly article available to read on EtoBox.

Author

Ahmad, Farooq; Khir, Mohd Haris Md; Hamid, Nor Hisham; Dennis, John Ojur

Publisher

IEEE

Published

2011

Language

EN