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SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Device and Multilevel Interconnection Technology II - Trench isolation technology for high-performance complementary bipolar devices by Brown, Kevin C.; Bracken, Chris; Bashir, Rashid; Egan, Kulwant; DeSantis, Joe; Kabir, Abul E.; Yindeepol, Wipawan; McGregor, Joel; Prasad, S. J.; Razouk, Reda; Boksha, Victor V.; Rey, Juan C.; Chen, Ih-Chin; Sasaki, Nobuo; Patel, Divyesh N.; Dixit, Girish A. is a scholarly article available to read on EtoBox.

Author
Brown, Kevin C.; Bracken, Chris; Bashir, Rashid; Egan, Kulwant; DeSantis, Joe; Kabir, Abul E.; Yindeepol, Wipawan; McGregor, Joel; Prasad, S. J.; Razouk, Reda; Boksha, Victor V.; Rey, Juan C.; Chen, Ih-Chin; Sasaki, Nobuo; Patel, Divyesh N.; Dixit, Girish A.
Publisher
SPIE
Published
1996
Language
EN

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Browse all works by Brown, Kevin C.; Bracken, Chris; Bashir, Rashid; Egan, Kulwant; DeSantis, Joe; Kabir, Abul E.; Yindeepol, Wipawan; McGregor, Joel; Prasad, S. J.; Razouk, Reda; Boksha, Victor V.; Rey, Juan C.; Chen, Ih-Chin; Sasaki, Nobuo; Patel, Divyesh N.; Dixit, Girish A.