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About this Engineering article
N2plasma Etching Processes of Microscopic Single Crystals of Cubic Boron Nitride by Tamura, Takahiro ;Takami, Takuya ;Yanase, Takashi ;Nagahama, Taro ;Shimada, Toshihiro is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Tamura, Takahiro ;Takami, Takuya ;Yanase, Takashi ;Nagahama, Taro ;Shimada, Toshihiro
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2017
- Language
- EN
- Field
- Engineering (Physical Sciences)