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About this scholarly article
1999 4th International Symposium on Plasma Process-Induced Damage (IEEE Cat. No.99TH8395) - A study of effects of plasma-induced charging damage on hot-carrier lifetime using pre-stressed data by Bhuva, B.; Mongkolkachit, P.; Bui, N.; Kerns, S. is a scholarly article available to read on EtoBox.
- Author
- Bhuva, B.; Mongkolkachit, P.; Bui, N.; Kerns, S.
- Publisher
- American Vacuum Soc
- Published
- 1999
- Language
- EN
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