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About this Engineering article
A Study on the Polycrystalline Silicon Germanium Gate Electrode Fabrication Technology for Cobalt Silicide Process by Sato, Hidekazu; Sukegawa, Takae; Mori, Toshifumi; Suzuki, Kousuke; Mori, Haruhisa is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Sato, Hidekazu; Sukegawa, Takae; Mori, Toshifumi; Suzuki, Kousuke; Mori, Haruhisa
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2001
- Language
- EN
- Field
- Engineering (Physical Sciences)