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About this Engineering article
Hydrogen Penetration into Si under Wet Chemical Etching: Experiment and Simulation by Feklisova, O.V.; Yakimov, E.B.; Yarykin, Nikolai is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Feklisova, O.V.; Yakimov, E.B.; Yarykin, Nikolai
- Publisher
- Trans Tech Publications, Ltd.; Scientific.net; Scitec Publications Ltd. (ISSN 1662-9779)
- Published
- 2001
- Field
- Engineering (Physical Sciences)
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