About this scholarly article

SPIE Proceedings [SPIE 1999 Symposium on Smart Structures and Materials - Newport Beach, CA (Monday 1 March 1999)] Smart Structures and Materials 1999: Smart Electronics and MEMS - MEMS-IDT-based accelerometers and gyroscopes by Varadan, Vijay K.; Xavier, Pascal; Varadan, Vasundara V.; Suh, D.; Atashbar, Massood Z.; Jose, K. A.; Varadan, Vijay K. is a scholarly article available to read on EtoBox.

Author

Varadan, Vijay K.; Xavier, Pascal; Varadan, Vasundara V.; Suh, D.; Atashbar, Massood Z.; Jose, K. A.; Varadan, Vijay K.

Publisher

SPIE

Published

1999

Language

EN