About this scholarly article

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - Assembly of hybrid microsystems in a large-chamber scanning electron microscope by use of mechanical grippers by Weck, Manfred; Huemmler, Joachim; Petersen, Bernd; Chang, Shih-Chia; Pang, Stella W. is a scholarly article available to read on EtoBox.

Author

Weck, Manfred; Huemmler, Joachim; Petersen, Bernd; Chang, Shih-Chia; Pang, Stella W.

Publisher

SPIE

Published

1997