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This document investigates the characteristics of Al₂O₃/amorphous IGZO photodetectors, focusing on the effects of IGZO thickness and Ar:O₂ gas flow during fabrication. It highlights how these parameters influence the electrical and photoresponsive behavior of the devices, particularly in terms of dark current, photoresponsivity, and stability. The findings emphasize the importance of optimizing fabrication conditions to enhance photodetector performance for various applications.

Author

Duy Anh Lê

Language

EN