Can I read Introduction to Metrology Applications in IC Manufacturing (Tutorial Texts) on EtoBox?

Introduction to Metrology Applications in IC Manufacturing (Tutorial Texts) by Bo Su, Eric Solecky, Alok Vaid, James A. Harrington (editor) is a nonfiction available to read on EtoBox.

What is Introduction to Metrology Applications in IC Manufacturing (Tutorial Texts) about?

Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncertainty analysis specifically, precision, matching, and relative accuracy.

Who reads Introduction to Metrology Applications in IC Manufacturing (Tutorial Texts)?

Author

Bo Su, Eric Solecky, Alok Vaid, James A. Harrington (editor)

Publisher

SPIE Press

Published

2015

Language

EN

ISBN

9781628418118

Category

nonfiction

Subjects

Engineering, Stem