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Can I read Pulsed Electron Beam for Silicon Annealing on EtoBox?
Pulsed Electron Beam for Silicon Annealing by G Leggieri; A Luches; V Nassisi; A Perrone; MR Perrone; G Majni; F Nava is a Engineering article available to read on EtoBox.
What is Pulsed Electron Beam for Silicon Annealing about?
The characteristics of an electron beam generator are given. It produces pulses up to 50 kV. currents up to 20 kA, with a pulse length of about 50 ns. It was designed and built for annealing of thin metal layers deposited on single crystal silicon wafers.
Who reads Pulsed Electron Beam for Silicon Annealing?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- G Leggieri; A Luches; V Nassisi; A Perrone; MR Perrone; G Majni; F Nava
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0042-207X)
- Published
- 1982
- Language
- EN
- Field
- Engineering (Physical Sciences)
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