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About this Engineering article
RF discharge modeling considering time dependence and spatial nonlocality of the electron energy spectrum by Feoktistov, V.A.; Popov, A.M.; Popovicheva, O.B.; Rakhimov, A.T.; Rakhimova, A.T.; Volkova, E.A. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Feoktistov, V.A.; Popov, A.M.; Popovicheva, O.B.; Rakhimov, A.T.; Rakhimova, A.T.; Volkova, E.A.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0093-3813)
- Published
- 1991
- Language
- EN
- Field
- Engineering (Physical Sciences)