About this Engineering article
Investigation of 4% Carbon in Hydrogen Electron Cyclotron Resonance Microwave Plasmas Using Ethane as the Source Gas by Webb, S. F.; Gaddy, G. A.; Blumenthal, Rik is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Webb, S. F.; Gaddy, G. A.; Blumenthal, Rik
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 1999
- Field
- Engineering (Physical Sciences)