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About this Engineering article
Electron beam induced SiO2 etch selectivity and its application to oxide nano-aperture formation by D.W. Kim; Y.C. Kim; V.C. Bui; M.S. Song; C.H. Han; S.S. Choi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- D.W. Kim; Y.C. Kim; V.C. Bui; M.S. Song; C.H. Han; S.S. Choi
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)
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