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About this Engineering article
IR study of plasma-nitrided thermal SiO2 and pure silicon by E.D. Atanassova; L.I. Popova; D.I. Kolev is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- E.D. Atanassova; L.I. Popova; D.I. Kolev
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 1993
- Field
- Engineering (Physical Sciences)
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