About this scholarly article

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing - Effects of nitrogen plasma immersion ion implantation in silicon by Kumar, Raj; Kumar, Mukesh; George, P. J.; Chari, K. S.; Mukherjee, Subroto; Knystautas, Emile J.; Kirk, Wiley P.; Browning, Valerie is a scholarly article available to read on EtoBox.

Author

Kumar, Raj; Kumar, Mukesh; George, P. J.; Chari, K. S.; Mukherjee, Subroto; Knystautas, Emile J.; Kirk, Wiley P.; Browning, Valerie

Publisher

SPIE

Published

2001