About this Engineering article
Comparison of methods to determine bandgaps of ultrathin HfO2 films using spectroscopic ellipsometry by Di, Ming; Bersch, Eric; Diebold, Alain C.; Consiglio, Steven; Clark, Robert D.; Leusink, Gert J.; Kaack, Torsten is a Engineering article available to read on EtoBox.
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- Author
- Di, Ming; Bersch, Eric; Diebold, Alain C.; Consiglio, Steven; Clark, Robert D.; Leusink, Gert J.; Kaack, Torsten
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2011
- Language
- EN
- Field
- Engineering (Physical Sciences)