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About this Engineering article
Effect of Pad Surface Texture and Slurry Abrasive Concentration on Tribological and Kinetic Attributes of ILD CMP by Philipossian, Ara ;Olsen, Scott is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Philipossian, Ara ;Olsen, Scott
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2003
- Language
- EN
- Field
- Engineering (Physical Sciences)