About this Engineering article
Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique by S. Suzuki; S. Tuchitani; K. Sato; S. Ueno; Y. Yokota; M. Sato; M. Esashi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- S. Suzuki; S. Tuchitani; K. Sato; S. Ueno; Y. Yokota; M. Sato; M. Esashi
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)
- Published
- 1990
- Language
- EN
- Field
- Engineering (Physical Sciences)