About this scholarly article

SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, CA (Saturday 20 January 2007)] Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII - Setting new standards in MEMS by Rimskog, Magnus; O'Loughlin, Brian J.; Maher, Mary-Ann; Stewart, Harold D.; Chiao, Jung-Chih; Suleski, Thomas J.; Johnson, Eric G.; Nordin, Gregory P. is a scholarly article available to read on EtoBox.

Author

Rimskog, Magnus; O'Loughlin, Brian J.; Maher, Mary-Ann; Stewart, Harold D.; Chiao, Jung-Chih; Suleski, Thomas J.; Johnson, Eric G.; Nordin, Gregory P.

Publisher

SPIE

Published

2007

Language

EN