About this scholarly article

SPIE Proceedings [SPIE Photonics West '96 - San Jose, CA (Saturday 27 January 1996)] Lasers as Tools for Manufacturing of Durable Goods and Microelectronics - Excimer laser-induced heating, melting, and mass diffusion in crystal silicon in nanosecond and nanometer scale by Zhang, X.; Ho, J. R.; Grigoropoulos, Constantine P.; Dubowski, Jan J.; Mazumder, Jyotirmoy; Migliore, Leonard R.; Roychoudhuri, Chandrasekhar; Schaeffer, Ronald D. is a scholarly article available to read on EtoBox.

Author

Zhang, X.; Ho, J. R.; Grigoropoulos, Constantine P.; Dubowski, Jan J.; Mazumder, Jyotirmoy; Migliore, Leonard R.; Roychoudhuri, Chandrasekhar; Schaeffer, Ronald D.

Publisher

SPIE

Published

1996

Language

EN