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Deposition of Highly Oriented Ta2O5 Piezoelectric Thin Films on Silicon for Fabricating Film Bulk Acoustic Resonator Structure by RF Magnetron Sputtering by Kakio, Shoji; Tsuchiya, Akinori; Nakagawa, Yasuhiko is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kakio, Shoji; Tsuchiya, Akinori; Nakagawa, Yasuhiko
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2011
- Field
- Engineering (Physical Sciences)
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