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About this Engineering article
Manipulation of exposure dose parameters to improve production of high aspect ratio structures using SU-8 by Daunton, R; Gallant, A J; Wood, D is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Daunton, R; Gallant, A J; Wood, D
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing; ScienceOpen (ISSN 0960-1317)
- Published
- 2012
- Field
- Engineering (Physical Sciences)