About this scholarly article

10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A novel test method of low leakage rate of MEMS vacuum packaging by Lei Li, ; Jie Li, ; Zhao Zhao, ; Han Wang, ; Wei Zhang, ; Jinsong Kan, is a scholarly article available to read on EtoBox.

Author

Lei Li, ; Jie Li, ; Zhao Zhao, ; Han Wang, ; Wei Zhang, ; Jinsong Kan,

Publisher

IEEE

Published

2015