About this scholarly article

2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) - Control of plasma uniformity with dual phase Very High Frequency Capacitively Coupled Plsamas by Kim, Jin Seok; Lee, Ho-Jun; Lee, Hae June is a scholarly article available to read on EtoBox.

Author

Kim, Jin Seok; Lee, Ho-Jun; Lee, Hae June

Publisher

IEEE

Published

2014

Language

EN