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About this Physics and Astronomy article
Comparison of Impurity Defect Structures Formed by Ion Implantations in Amorphous and Crystalline Silicon by G. Weyer; S. Damgaard; J.W. Petersen; J. Heinemeier is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- G. Weyer; S. Damgaard; J.W. Petersen; J. Heinemeier
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-5087)
- Published
- 1982
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)
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