Opening book details…
Can I read TiN/SiNx submicronic multilayer coatings obtained by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) on EtoBox?
TiN/SiNx submicronic multilayer coatings obtained by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by J. Perez-Mariano; J. Caro; C. Colominas is a Engineering article available to read on EtoBox.
What is TiN/SiNx submicronic multilayer coatings obtained by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) about?
TiN/SiN x multilayer coatings were deposited on stainless steel by Chemical Vapor Deposition in a Fluidized Bed Reactor at Atmospheric Pressure (AP/FBR-CVD) by reaction of TiCl 4 and SiCl 4 with NH 3 at 850 °C. Due to the immiscibility of crystalline TiN and amorphous SiN x , interdiffusion between layers is avoided even at the high working temperature. The thickness of the individual layer was in the nanometer range. Coatings were characterized by means of SEM, TEM, GD-OES, SIMS, XRD and nanoindentation. A mechanism for the growth rate and diffusion of Ti and Si into the steel is discussed.
Who reads TiN/SiNx submicronic multilayer coatings obtained by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J. Perez-Mariano; J. Caro; C. Colominas
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)