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About this Engineering article
Analytical Plasma Impedance Model of Dual Frequency Capacitive Discharges with Ion Dynamics by Kuhfeld, Jan; Sakiyama, Yukinori; Czarnetzki, Uwe is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kuhfeld, Jan; Sakiyama, Yukinori; Czarnetzki, Uwe
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0963-0252)
- Published
- 2019
- Field
- Engineering (Physical Sciences)
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