About this scholarly article

SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2016 - Zvenigorod, Russian Federation (Monday 3 October 2016)] International Conference on Micro- and Nano-Electronics 2016 - Temperature switching waves in a silicon wafer on lamp-based heating by Lukichev, Vladimir F.; Rudenko, Konstantin V.; Ovcharov, Vladimir V.; Kurenya, Alexey L.; Rudakov, Valery I.; Prigara, Valeriya P. is a scholarly article available to read on EtoBox.

Author

Lukichev, Vladimir F.; Rudenko, Konstantin V.; Ovcharov, Vladimir V.; Kurenya, Alexey L.; Rudakov, Valery I.; Prigara, Valeriya P.

Publisher

SPIE

Published

2016

Language

EN