Opening book details…
About this Engineering article
SU-8 Photolithography as a Toolbox for Carbon MEMS by Martinez-Duarte, Rodrigo is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Martinez-Duarte, Rodrigo
- Publisher
- MDPI AG; Multidisciplinary Digital Publishing Institute (MDPI); Basel: Multidisciplinary Digital Publishing Institute (MDPI), 2010- (ISSN 2072-666X)
- Published
- 2014
- Field
- Engineering (Physical Sciences)