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About this Engineering article
Advanced Process Control Expert System of CVD Membrane Thickness Based on Neural Network by Chang, Ming; Chen, Jen Cheng; Chang, Jui Wen; Heh, Jia Sheng is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Chang, Ming; Chen, Jen Cheng; Chang, Jui Wen; Heh, Jia Sheng
- Publisher
- Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9752)
- Published
- 2006
- Field
- Engineering (Physical Sciences)
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